III-V MBE System

To study 2DEG systems, a III-V MBE system has been constructed with the ability to grow GaAs, GaAlAs, and InAs. The chamber, with integral cryopanels, was custom designed. The k-cells and control systems are commercial available. Samples grown in this MBE system can be transferred in situ to any chamber on the system using the central rotary transfer system.

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Online: May 2000
Last Updated: July 2007