Nanofabrication of a two-dimensional array of chromium "dots"

With the goal of extending the nanofabrication of chromium lines by laser-focused atomic deposition to encompass more complicated patterns, we have recently accomplished the nanofabrication of a two dimensional array of dots using two orthogonal standing waves. The results have been published in Applied Physics Letters [EPG pub# 646].

Atomic force microscope image of two-dimensional array formed by laser-focused atomic deposition of Cr. Features have height 13 nm, width 80 nm, and are on a 213 x 213 nm square grid

While the extension to two dimensions may seem conceptually simple, there are potential pitfalls regarding the temporal phases of the two orthogonal standing waves in this experiment. In general, the intensity pattern will depend on the relative path lengths experienced by the two standing waves because of constructive or destructive interference, and if the path lengths vary due to acoustical vibrations, the pattern can be smeared out. However, we have chosen the polarizations of the two waves to be perpendicular to each other (one parallel to the substrate surface, the other perpendicular). With this choice, the intensity no longer depends on the relative phase so it remains stable. The price paid is an intensity distribution that is not entirely cylindrically symmetric about each node, though the effect of this is minor.

Nanofabrication of a Two-Dimensional Array Using Laser-Focused Atomic Deposition


Jabez J. McClelland - NIST
Robert J. Celotta - NIST


Bobby Anderson - Lighthouse, Inc.
Curtis Bradley - Petroleum Institute, Dubai
Rajeev Gupta
Zeina Jabbour - NIST
Robert Scholten - University of Melbourne

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Online: May 1996
Last update: February 2008

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