Molecular beam epitaxy (MBE) is used to produce artificial structures with
abrupt interfaces at the single atomic layer level. The nonequilibrium nature
of MBE, in most applications, leads to a supersaturation of adsorbed species,
which must undergo complicated processes such as dissociation, diffusion,
nucleation, and film growth. The most widely used technique to monitor MBE
growth is reflection-high-energy-electron-diffraction (RHEED), in which a high
energy (typically 10 keV to 30 keV) electron beam strikes a surface
at grazing incidence and the resulting diffraction pattern is monitored.
Through detailed modeling of RHEED intensity oscillations there have been
attempts to extract information on the surface morphology and processes such as
diffusion and nucleation, but real space measurements have been lacking.
We have used scanning tunneling microscopy (STM) to obtain real space images
of the homoepitaxial growth of Fe on Fe(001) which we correlate with the
corresponding RHEED patterns and RHEED intensity oscillations. Such
measurements are illustrated in Fig. 1 which shows RHEED intensity
measurements of the (0,0) diffracted beam during growth and the RHEED patterns
and the STM images of the surface morphology after growth was stopped at five
oscillations. Diffusion kinetics which are very temperature dependent strongly
influence the growth as it progresses from island growth to thin film growth.
At the lower temperature of 20° C, the higher propensity for
nucleation and the barriers to step edge diffusion result in a rough film with
five exposed layers as seen in Fig. 1(a). The islands have a mean
center-to-center spacing of approximately 5 nm. This structure gives rise
to a splitting of the diffraction beams in the RHEED pattern. The observed
splitting is in agreement with simulations calculated from the surface
correlation function obtained from the real space STM image in Fig. 1(a).
The decay of the RHEED intensity oscillations is correlated with the surface
roughness which detailed measurements of the surface morphology at this
temperature show increases monotonically with film thickness. An increased
diffusion rate at higher temperatures results in a larger terrace structure as
seen in Fig. 1(b) for the 180° C growth temperature.
Interestingly, the surface roughness is comparable to the growth at
20° C, and there are still five layers exposed. This is an indication
that the barrier to step diffusion has not yet been overcome at this
temperature. The RHEED intensity shows stronger oscillations but still with a
significantly damped intensity envelope. Nearly layer-by-layer growth is
observed at a growth temperature of 250° C shown in Fig. 1(c).
The surface morphology is seen to consist of three layers with one layer
predominant. Layer-by-layer growth is characterized by the RHEED intensity
oscillations returning to nearly their initial intensity value with very little
damping. Further measurements at this temperature support a kinematic
description of the RHEED intensity oscillations observed for this system.
Figure 1: STM image, diffraction patterns, and RHEED (0,0) beam
intensity measurements of Fe on Fe(001) growth.
Supported in part by the Office of Naval Research
Online: May 1996
Last Updated: February 2008
epgwebmaster@nist.gov