Physical Review B 16(4), 1370-1379 (1977)
Values are reported for the absolute yields of KVV Auger electrons from beryllium and L23VV Auger electrons from aluminum excited by 60- to 220-keV proton bombardment. The measurements were made using semi-infinite evaporated samples, and the results were used to derive effective values of the inelastic attenuation lengths for low-energy Auger electrons in the surface regions of the samples. The attenuation lengths determined using this technique were 6.1 Å for 100-eV electrons in Be and 1.9 Å for 67-eV electrons in Al. These effective attenuation lengths are appropriate for use in Auger-electron spectroscopy and x-ray photoelectron spectroscopy.
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