Proposed Formula for Electron Inelastic Mean Free Paths Based on Calculations for 31 Materials

S. Tanuma, C.J. Powell, and D.R. Penn

Surface Science 192, L849 (1987)

Abstract:

A new general formula is proposed for determining electron inelastic mean free paths (IMFP's) for 200-2000 eV electrons in solids. The new formula is based on separate IMFP calculations of 27 elements and 4 compounds using an algorithm due to Penn. This formula is believed useful for determining the IMFP dependence on electron energy for a given material and the material-dependence for a given energy. The new formula should also be a reasonable guide to electron attenuation lengths which have been difficult to determine with the needed accuracy.




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