NSTI-Nanotech 2009 Technical Proceedings 1-3, 194-197 (2009).
In this paper, a simple, fast, all-plasma surface modification (APSM) process, which can form super-hydrophobic and/or super-hydrophilic surfaces is introduced. The APSM process includes plasma-induced surface nano-pattern formation, substrate etching and surface chemical modification. By using this process, large area super-hydrophobic or super-hydrophilic surfaces can be fabricated easily. The wetting properties can be switched between super-hydrophobic and super-hydrophilic by simply changing the plasma chemistry. By using a stencil mask to selectively modify areas on the surface with different chemicals, both super-hydrophobic and hydrophilic areas can be created on a single surface. APSM is an environmentally friendly and economic process which can be used in a variety of applications.
Keywords:Super-hydrophobic, Super-hydrophilic, Plasma, Nano-pattern, SurfaceCenter for Nanoscale Science and Technology
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